Arc Ion Plating Process Monitoring by Optical Emission Spectroscopy Exemplified for Chromium Containing Coatings

Weinheim / Wiley (2009) [Contribution to a conference proceedings, Journal Article]

Plasma processes and polymers
Volume: 6.2009
Issue: 6/7
Page(s): S357-S361

Authors

Authors

Bobzin, Kirsten
Bagcivan, Kirsten
Immich, Philipp
Theiß, Sebastian

Identifier