Fabrication of hierarchical structures by direct laser writing and multi-beam-interference

Osaka / JLPS, Japan Laser Processing Society (2013) [Journal Article]

Journal of laser micro/nanoengineering
Volume: 8
Issue: 3
Page(s): 210-215

Authors

Authors

Steger, Michael
Hartmann, Claudia
Beckemper, Stefan
Holtkamp, Jens
Gillner, Arnold

Identifier