Effect of damage incubation in the laser grooving of sapphire

Sakurai, Haruyuki; He, Chao; Konishi, Kuniaki; Tamaru, Hiroharu; Yumoto, Junji; Kuwata-Gonokami, Makoto (Corresponding author); Gillner, Arnold

Melville, NY : American Inst. of Physics (2019)
Fachzeitschriftenartikel

In: Journal of applied physics
Band: 125
Heft: 17
Seite(n)/Artikel-Nr.: 173109