Fabrication of hierarchical structures by direct laser writing and multi-beam-interference
Steger, Michael; Hartmann, Claudia; Beckemper, Stefan; Holtkamp, Jens; Gillner, Arnold
Osaka : JLPS, Japan Laser Processing Society (2013)
Journal Article
In: Journal of laser micro/nanoengineering
Volume: 8
Issue: 3
Page(s)/Article-Nr.: 210-215
Identifier
- DOI: 10.2961/jlmn.2013.03.0005
- RWTH PUBLICATIONS: RWTH-CONV-084416