Fabrication of hierarchical structures by direct laser writing and multi-beam-interference

Steger, Michael; Hartmann, Claudia; Beckemper, Stefan; Holtkamp, Jens; Gillner, Arnold

Osaka : JLPS, Japan Laser Processing Society (2013)
Journal Article

In: Journal of laser micro/nanoengineering
Volume: 8
Issue: 3
Page(s)/Article-Nr.: 210-215

Identifier