Feedback control for priority rules in re-entrant semiconductor manufacturing
He, Fenglan; Armbruster, Dieter (Corresponding author); Herty, Michael; Dong, Ming
Amsterdam [u.a.] : Elsevier Science (2015)
Journal Article
In: Applied mathematical modelling
Volume: 39
Issue: 16
Page(s)/Article-Nr.: 4655-4664
Abstract
Institutions
- Integrative ProductionTechnology for High-Wage Countries [080025]
- Department of Mathematics [110000]
- Lehr- und Forschungsgebiet Mathematik [114620]
Identifier
- DOI: 10.1016/j.apm.2015.03.061
- RWTH PUBLICATIONS: RWTH-2015-06711