Optische Systeme für die hochpräzise, scannerbasierte Multistrahlbearbeitung mit ultrakurzen Laserpulsen

  • Optical systems for high-precision, scanner-based multi-beam processing with ultra-short laser pulses

Büsing, Lasse; Loosen, Peter (Thesis advisor); Ostendorf, Andreas (Thesis advisor)

Aachen (2016)
Dissertation / PhD Thesis

Dissertation, RWTH Aachen, 2016


The utilization of ultra-short pulses (< 10 ps) has been established in several fields of laser technology for processing most different materials with highest precision. Currently, one of the key challenges is the increase of processing throughput and therefore the development of optical systems which enable an efficient distribution of laser radiation onto the work piece. The multi-beam technology thereby represents an alternative to fast deflection systems and is therefore investigated within this thesis. In particular, position deviations for several foci at the work piece are considered which are induced for example by beam deflection systems. An additional research priority is the analysis of dispersion-related effects, which occur due to the increased bandwidth of ultra-short laser pulses and especially affect applications in the field of multi-beam technology. Beside simulation and analysis methods, different approaches to increase the spatial accuracy as well as to homogenize the pulse properties are developed and applied.