Rapid nanostructuring using multi-beam-interference with consecutively overlapped ultrashort laser pulses

He, Chao (Corresponding author); Steger, Michael; Gillner, Arnold

(2017)
Contribution to a conference proceedings

In: [18th International Syposium on Laser Precision Microfabrication, LPM 2017, 2017-06-05 - 2017-06-08, Toyama, Japan]
Page(s)/Article-Nr.: 4 Seiten