High-Efficiency Sub-Micrometer Multi-Beam Interference Structuring for Large-Scale Surface Using Ultrashort Laser Pulses

He, Chao (Corresponding author); Vannahme, Kai; Gillner, Arnold

Osaka (2019)
Journal Article

In: Journal of Laser Micro/Nanoengineering
Volume: 14
Issue: 1
Page(s)/Article-Nr.: 95-99

Institutions

• Fraunhofer Institute for Laser Technology [053100]
• Internet of Production [080067]
• Chair for Laser Technology [418710]