Effect of damage incubation in the laser grooving of sapphire

Sakurai, Haruyuki; He, Chao; Konishi, Kuniaki; Tamaru, Hiroharu; Yumoto, Junji; Kuwata-Gonokami, Makoto (Corresponding author); Gillner, Arnold

Melville, NY : American Inst. of Physics (2019)
Journal Article

In: Journal of applied physics
Volume: 125
Issue: 17
Page(s)/Article-Nr.: 173109

Identifier

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