Effect of damage incubation in the laser grooving of sapphire

Sakurai, Haruyuki; He, Chao; Konishi, Kuniaki; Tamaru, Hiroharu; Yumoto, Junji; Kuwata-Gonokami, Makoto (Corresponding author); Gillner, Arnold

Melville, NY : American Inst. of Physics (2019)
Journal Article

In: Journal of applied physics
Volume: 125
Issue: 17
Page(s)/Article-Nr.: 173109

Institutions

• Fraunhofer Institute for Laser Technology [053100]
• Internet of Production [080067]
• Chair for Laser Technology [418710]