High-precision ultrashort pulsed laser processing of metal foils using an advanced multibeam optic

Barthels, Thilo (Corresponding author); Niessen, Markus; Reininghaus, Martin; Wang, You

Bellingham, Washington : SPIE (2020)
Contribution to a book, Contribution to a conference proceedings

In: Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXV : 3-5 February 2020, San Francisco, California, United States / Gediminas Račiukaitis, Carlos Molpeceres, Jie Qiao, Aiko Narazaki (editors) ; sponsored by: SPIE