Fusion of micro-metrology techniques for the flexible inspection of MEMS/MOEMS assembly

Bellingham, Wash / SPIE (2008) [Contribution to a book, Contribution to a conference proceedings]

Optical micro- and nanometrology in microsystems technology II : 8 - 10 April 2008, Strasbourg, France / sponsored by SPIE Europe. Christophe Gorecki ..., ed.
Page(s): 69950I, 12 S.

Authors

Authors

Schmitt, Robert Heinrich
Pavim, A.

Identifier