Fusion of micro-metrology techniques for the flexible inspection of MEMS/MOEMS assembly

Schmitt, Robert H.; Pavim, A.

Bellingham, Wash : SPIE (2008)
Contribution to a book, Contribution to a conference proceedings

In: Optical micro- and nanometrology in microsystems technology II : 8 - 10 April 2008, Strasbourg, France / sponsored by SPIE Europe. Christophe Gorecki ..., ed.
Page(s)/Article-Nr.: 69950I, 12 S.